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KMID : 0380020070220060433
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Korean Journal of Biotechnology and Bioengineering
2007 Volume.22 No. 6 p.433 ~ p.437
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Fabrication of Nanopatterns for Biochip by Nanoimprint Lithography
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Oh Byeong-Geun
Choi Jeong-Woo
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Abstract
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A constant desire has been to fabricate nanopatterns for biochip and the Ultraviolet-nano imprint lithography (UV-NIL) is promising technology especially compared with thermal type in view of cost effectiveness. By using this method, nano-scale to micro-scale structures also called nanopore structures can be fabricated on large scale gold plate at normal conditions such as room temperature or low pressure which is not possible in thermal type lithography. One of the most important methods in fabricating biochips, immobilizing, was processed successfully by using this technology. That means immobilizing proteins only on the nanopore structures based on gold, not on hardened resin by UV is now possible by utilizing this method. So this selective nano-patterning process of protein can be useful method fabricating nanoscale protein chip.
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KEYWORD
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Nanoimprint, lithography, nanopore, patternning, protein chip
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